是否进口:否 | 产地:台湾 | 设备名称:裸晶测试仪 |
品牌:FitTech | 型号:APT 6000 | 保修期:1年 |
用途:检测裸晶 | 交货期:60天 | 是否跨境货源:否 |
l 设备名称:整合型LED晶粒/晶圆点测机 裸晶测试仪
型号:APT 6000
l 标准配备
1. 机构部分:
u X、Y、Z、θ轴(精度详见规格)
u Chuck table(非导电盘&导电盘,共2块)
u XYZ 调整座 2 座
u Edge Sensor 2 座
u 彩色CCD 1组,1倍镜头,供扫描定位用、供探针定位、外观检视用
u 掀开式遮光罩
u 电控箱
u 分光卡:350nm-1050nm
选配部分:
u 清针模块 (毛刷 & 贴片 & 吹气)
è 毛刷及贴片为耗材,依客户的使用状况决定更换次数
u ESD 模块:HBM/MM ± 4 KV
è Relay 寿命***:6个月或2亿次(以先到为主)
2. 测试机部份
u 电源供应器:SF
u Tester基本架构图如下:APT6000
3. IPC 部 分
u 中央处理器:双核心 CPU G3420 3.2 GHz
u 存储器:4G
u 硬盘:500G
u 17”LCD或以上荧幕、光学鼠标、键盘
u 作业系统 : Win 7
l General Spec.
Item | Description | Specification |
Working Area | For 2~7.8 inches | 198mm |
Chuck | Planariztion | ±0.01 mm |
X axis | Max. travel stroke | 200 mm |
Resolution | 0.5 μm | |
Accuracy | <10 μm over 100 mm | |
Y axis | Max. travel stroke | 300 mm |
Resolution | 0.5 μm | |
Accuracy | <10 μm over 100 mm | |
Z axis | Max. travel stroke | 8 mm |
Resolution | 1.2 μm | |
Accuracy | <5 μm over 30 mm | |
θ axis | Rotation range | ± 30° |
Resolution | 0.0018° | |
Accuracy | <10 μm over 160 mm | |
Machine Vision | Camera | CCD |
Illumination | Remote control | |
Focus | Manual adjustment | |
Alignment | Auto alignment | |
CCD Resolution | 1280*960 pixels | |
Magnification of Lens | 1x | |
Field of View | 6.4mm × 4.8 mm |
l Test Spec.
l Source Meter : SF
l 厂务需求
Item | Unit | Specification |
Machine Size W × D × H | mm | 930x900x1670 |
Machine Weight | Kg | 600 |
Power source | V | 110 |
Power current | A | 13 |
Air pressure | Kgf/cm? | 5 |
Air flow rate | NL/min | 5 |
Air tube Diameter | mm | ψ10 |
Vacuum pressure | mmHg | -660 |
Vacuum flow rate | NL/min | 40 |
Vacuum tube Diameter | mm | ψ6 |